MEMS Silicon Dies series

  • Merit Sensor
  • High-volume, medium-pressure sensing elements
  • Pressure ranges available 15psi, 50psi, 100psi, 300psi & 500psi
  • Absolute or Gauge options available
  • Temperature range −40°C to +150°C
  • Full scale outputs from 60mV to 210mV (at 5V excitation)
  • Impedance of 5kΩ (typical) or 3.5kΩ±0.5kΩ (optional)
  • Suitable for clean, dry air and non-corrosive gases media
  • Merit Sensor
  • Ultra-low pressure MEMS piezoresistive pressure sensor
  • Pressure ranges of 0.15psi, 0.3psi & 1psi
  • Constraint of Gauge
  • Temperature range −40°C to +150°C
  • Full scale outputs from 30mV to 60mV (at 5V excitation)
  • Impedance of 5kΩ (typical)
  • Suitable for clean, dry air and non-corrosive gases media