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MEMS Silicon Dies series

Merit Sensor 7000 Series

High-volume, medium-pressure sensing elements
Pressure ranges available 15psi, 50psi, 100psi, 300psi & 500psi
Absolute or Gauge options available
Temperature range −40°C to +150°C
Full scale outputs from 60mV to 210mV (at 5V excitation)
Impedance of 5kΩ (typical) or 3.5kΩ±0.5kΩ (optional)
Suitable for clean, dry air and non-corrosive gases media

Merit Sensor L Series

Ultra-low pressure MEMS piezoresistive pressure sensor
Pressure ranges of 0.15psi, 0.3psi & 1psi
Constraint of Gauge
Temperature range −40°C to +150°C
Full scale outputs from 30mV to 60mV (at 5V excitation)
Impedance of 5kΩ (typical)
Suitable for clean, dry air and non-corrosive gases media

Merit Sensor 7000 Series

High-volume, medium-pressure sensing elements
Pressure ranges available 15psi, 50psi, 100psi, 300psi & 500psi
Absolute or Gauge options available
Temperature range −40°C to +150°C
Full scale outputs from 60mV to 210mV (at 5V excitation)
Impedance of 5kΩ (typical) or 3.5kΩ±0.5kΩ (optional)
Suitable for clean, dry air and non-corrosive gases media

Merit Sensor L Series

Ultra-low pressure MEMS piezoresistive pressure sensor
Pressure ranges of 0.15psi, 0.3psi & 1psi
Constraint of Gauge
Temperature range −40°C to +150°C
Full scale outputs from 30mV to 60mV (at 5V excitation)
Impedance of 5kΩ (typical)
Suitable for clean, dry air and non-corrosive gases media