Harsh Media MEMS Silicon Piezoresistive Pressure Sensor

The HM series harsh media pressure MEMS sensing elements from Merit Sensor^TM is ideal for low and medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The HM series from Merit Sensor^TM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

• Broad pressure MEMS sensing elements
• Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
• Absolute pressurised from the cavity side or gauge pressurised from either side of the diaphragm
• Temperature range −40°C to +150°C
• Typical full scale output (at 5V excitation) 75mV at 15psi, 150mV at 100psi, 135mV at 300psi and 175mV at 500psi
• Impedance of 5kΩ (typical) or 3.5kΩ (optional)
• Suitable for air, gases and liquids that are compatible with silicon and glass
• Sawn wafer on tape in metal frame or die in waffle pack
• Bridge options of closed or closed with temperature diode
• AEC-Q100 qualified

Typical applications for the Merit Sensor^TM HM series include:

• Industrial
• Aerospace
• Automotive
• Medical

Please see below the specifications for the Merit Sensor^TM HM series: