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Merit Sensor

MEMS Silicon Dies series

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We offer MEMS silicon dies in various sizes and sensitivities as well as different pressure types, such as absolute and gauge/gage.

Merit Sensor 7000 Series

High-volume, medium-pressure sensing elements
Pressure ranges available 15psi, 50psi, 100psi, 300psi & 500psi
Absolute or Gauge options available
Temperature range −40°C to +150°C
Full scale outputs from 60mV to 210mV (at 5V excitation)
Impedance of 5kΩ (typical) or 3.5kΩ±0.5kΩ (optional)
Suitable for clean, dry air and non-corrosive gases media

Merit Sensor HM Series

Harsh media low and medium pressure MEMS sensing element
Suitable for air, gases and liquids that are compatible with silicon and glass
Bridge options of closed or closed with temperature diode available
Parts supplied as sawn wafer on tape in metal frame or die in waffle pack

Merit Sensor J Series

Low pressure MEMS sensing element
Suitable for clean, dry air and non corrosive gases
Bridge options of half open and closed available
Parts supplied as sawn wafer on tape in metal frame

Merit Sensor L Series

Ultra-low pressure MEMS piezoresistive pressure sensor
Pressure ranges of 0.15psi, 0.3psi & 1psi
Constraint of Gauge
Temperature range −40°C to +150°C
Full scale outputs from 30mV to 60mV (at 5V excitation)
Impedance of 5kΩ (typical)
Suitable for clean, dry air and non-corrosive gases media

Merit Sensor S Series

Precision MEMS silicon pressure sensor die
Pressure ranges of 5 to 300psi / 0.34 to 21 bar
Pressure type of absolute or gauge
Temperature range −40°C to +150°C
Full scale outputs from 60mV to 180mV (at 5V excitation)
Impedance of 5kΩ (typical)
Suitable for clean, dry air and non-corrosive gases media